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Keywords Cu interconnect;Microstructure;Stress;Electromigration; 关键词铜互连线;微观结构;应力;电徙动;
Study of a Novel Freestanding Cu Interconnect Process 制备Cu互连悬空结构的新型工艺研究
In this thesis, we focuse on the microstructure and stress of ULSI Cu interconnects with their impacts on MTF of the electromigration. 本论文主要研究了ULSI中铜互连线的微观结构和应力及其对与电徙动MTF的影响。
Keywords Cu;Sisal;Lime;Tolerance;Soil remediation; 剑麻;石灰;耐性;土壤修复;
Keywords Cu;ACuCC;the East China Sea;Kuroshio; 关键词铜;表观络合容量;海水;东海黑潮;
Keywords Cu Ni alloy;hard alloy;reamer; 铜镍合金;硬质合金;铰刀;
The electron backscatter diffraction technique (EBSD) has been used to measure the microstructure of reactive ion etched(RIE) Al and damascene Cu interconnects, including the grain size, grain orientation and grain boundary characteristics. 利用电子背散射衍射(EBSD)技术;测量了由反应离子刻蚀工艺(RIE)制备的Al互连线和大马士革工艺(Damascene)制备的Cu互连线的显微结构;包括晶粒尺寸、晶体学取向和晶界特征.
In this paper, the Damascene Cu interconnecting integration technology, low-k dielectric materials and barrier materials in Cu interconnecting integration technology are introduced. 论述了铜互连技术中低k介质材料、势垒层材料以及铜互连布线的大马士革工艺.
Keywords Cu;Zn-superoxide dismutase;synthesis;activity; 铜锌超氧化物歧化酶;合成;活性;
Research and Development of the Cu Interconnect and Its Electromigration Failure 铜互连电迁移失效的研究与进展
Keywords Cu U Au mineralization\ tectonic breccia\ pitchblende; 铜铀金矿化;构造角砾岩;沥青铀矿;
Development of wet processing technique and its application for Cu interconnect in IC industry 集成电路湿法工艺的开发及其在铜内联结构的应用
Keywords Cu;Zn superoxide dismutase;copperion;dimerization; 铜锌超氧化物歧化酶;铜离子;二聚作用;
Keywords Cu;Trifolium repens;Growth;Soil enzyme activity.; 铜;三叶草;生长;土壤酶活性;
Keywords Cu;Commelina communis;tolerance;accumulation; 鸭跖草;耐性;积累;
Keywords Cu middlings;molybdenum;NaOH digestion;extraction; 铜钼中矿;钼;碱分解;萃取;
Keywords Cu thin film;submicron-scale;fatigue;microstructure; 铜薄膜;亚微米尺度;疲劳;微观结构;
Keywords Cu Al-Ni shape memory alloy;pseudoelasticity; 形状记忆;马氏体相变;铜合金;
Keywords Cu clad diamond;resinoid wheel;grinding;wear resisting; 镀铜金刚石;树脂砂轮;磨削;耐磨性;
Keywords Cu;Zn;Fe;and Mn;Microwave digest samples;FAAS;tea-leaf; 铜;锌;铁和锰;微波高压消解;火焰原子吸收法;茶叶;